These series machines are floor-standing high-precision single side polishing machines. It can be matched with copper plate, tin plate, glass plate, stainless steel plate, etc., and with different types of polishing slurry, suitable for high-precision polishing of various semiconductor materials.
| Specification / model | TSP-400 | TSP-450 |
| Polishing plate size | 400mm | 450mm |
| Ceramic plate size | 139mm | 159mm |
| Polishing head qty. | 2 | 2 |
| Polishing plate rotation | 0~90 RPM | 0~90 RPM |
| Polishing head rotation | 0~60RPM | 0~60RPM |
| Machine size | 1350X1000X2100 mm | 1350X1000X2100 mm |
| Machine weight | 1180kg | 1180kg |
| Hard rail hydraulic turning tool system | Optional | Optional |
| Corrosion resistant coating | Optional | Optional |
86-10-6477 8430
Add：Building 6, No. 3, Duyang North Street, Shunyi District, Beijing 101300
Email：sales@tsd-semicon.com
Fax：86-10-6477 8420
