Post-CMP Cleaning Machine
These series machines are special cleaning machines after wafer CMP. They have different structures such as single station type, index type, and in-line type, can be used in different applications, the in-line type machine is equipped with fully- automatic loading and unloading system. These series machines are equipped with rinsing, double-side brushing, megasonic cleaning, N2 drying, high-speed spin-drying functions, high integration, small foot space, wet in and dry out, suitable for cleaning all kinds of wafers after CMP.
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